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Electrostatic chucks

E-chuck is a kind of clean chip’s carrier used in vacuum or plasma environment. The applied electrostatic chucking technology is a superior alternative to mechanical or vacuum clamping, which widely used in semiconductor or optical field.

  • Automated handling E-chuck

    Automated handling E-chuck

  • Wafer Hand

    Wafer Hand

  • Optical Detection Stage

    Optical Detection Stage

  • Electrostatic Carrier Belt

    Electrostatic Carrier Belt